The continued increase in semiconductor device sophistication, and resultant decrease in line widths, require cleaner components throughout process gas delivery systems. Properly designed high purity gas filter assemblies are transparent to homogeneous constituents in the gas stream, i.e., to remove particulate contamination with no other effect on the inlet gas purity. In order to accomplish this goal, the assemblies used to house the filter devices are most often constructed of smooth, clean and electropolished 316 stainless steel.
